【自动发货67份】chamber+pm，涉及AMAT，LAM，Novellus，TEL，Hitachi，Varian，Axcelis，Kokusai等，发全部。

包含AMAT、LAM、Novellus、TEL、Hitachi、Varian、Axcelis、Kokusai等品牌设备的PM程序文档。全新资料，原价1300，现低价转让。

内容包括：

Alcatel 2460 Process Chamber PM Procedure

AMAT 200MM DPS® Chamber PM Procedure

AMAT 200MM HDP Chamber Scrub PM Procedure

AMAT 200MM HDP Dome Scrub PM Procedure

AMAT 5500 TxZ®- Chamber PM Procedure

AMAT 5500 TxZ®- Super Clean PM Procedure

AMAT Centura® 5200 Etch Chamber PM Procedure

Slurry Clean PM Procedure

AMAT Endura® CVDPVD Lid Clean PM Procedure

AMAT Endura®- PVD DeGas Chamber Heater PM - 3rd Generation PM Procedure

AMAT Etch PM Procedure

AMAT High Current Implant Decel Column PM Procedure

AMAT P5000 CVD Chamber PM Procedure

AMAT Producer®- Heater PM Procedure

电子版资料一经售出不退不换。

#3097资料